6/27/2011	9:34:27 AM	Program exited cleanly
6/27/2011	9:34:58 AM	Program started normally
6/27/2011	9:34:58 AM	Helium valve closed
6/27/2011	9:34:58 AM	H2 valve closed
6/27/2011	9:34:58 AM	BCl3 valve closed
6/27/2011	9:34:58 AM	PH3 valve closed
6/27/2011	9:34:58 AM	SiCl4 pre valve closed
6/27/2011	9:34:58 AM	SiCl4 post valve closed
6/27/2011	9:34:58 AM	Main Vac valve closed
6/27/2011	9:34:58 AM	Bypass valve closed
6/27/2011	9:34:58 AM	Bubbler valve closed
6/27/2011	9:34:58 AM	Helium MFC set to  0.000000
6/27/2011	9:34:58 AM	H2 MFC set to  0.000000
6/27/2011	9:34:58 AM	BCl3 MFC set to  0.000000
6/27/2011	9:34:58 AM	PHl3 MFC set to  0.000000
6/27/2011	9:34:58 AM	SiCl4 MFC set to  0.000000
6/27/2011	9:34:58 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	9:34:58 AM	Tube furnace set to 0
6/27/2011	9:35:01 AM	Bypass valve opened
6/27/2011	9:35:01 AM	Main Vac valve opened
6/27/2011	9:35:05 AM	Bypass valve closed
6/27/2011	9:35:06 AM	Main Vac valve closed
6/27/2011	9:35:18 AM	Main Vac valve opened
6/27/2011	9:35:23 AM	Program exited cleanly
6/27/2011	10:48:18 AM	Program started normally
6/27/2011	10:48:18 AM	Helium valve closed
6/27/2011	10:48:18 AM	H2 valve closed
6/27/2011	10:48:18 AM	BCl3 valve closed
6/27/2011	10:48:18 AM	PH3 valve closed
6/27/2011	10:48:18 AM	SiCl4 pre valve closed
6/27/2011	10:48:18 AM	SiCl4 post valve closed
6/27/2011	10:48:18 AM	Main Vac valve closed
6/27/2011	10:48:18 AM	Bypass valve closed
6/27/2011	10:48:18 AM	Bubbler valve closed
6/27/2011	10:48:18 AM	Helium MFC set to  0.000000
6/27/2011	10:48:18 AM	H2 MFC set to  0.000000
6/27/2011	10:48:18 AM	BCl3 MFC set to  0.000000
6/27/2011	10:48:18 AM	PHl3 MFC set to  0.000000
6/27/2011	10:48:18 AM	SiCl4 MFC set to  0.000000
6/27/2011	10:48:18 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	10:48:18 AM	Tube furnace set to 0
6/27/2011	10:48:20 AM	Bypass valve opened
6/27/2011	10:48:20 AM	Main Vac valve opened
6/27/2011	10:48:24 AM	Program exited cleanly
6/27/2011	10:48:55 AM	Program started normally
6/27/2011	10:48:55 AM	Helium valve closed
6/27/2011	10:48:55 AM	H2 valve closed
6/27/2011	10:48:55 AM	BCl3 valve closed
6/27/2011	10:48:55 AM	PH3 valve closed
6/27/2011	10:48:55 AM	SiCl4 pre valve closed
6/27/2011	10:48:55 AM	SiCl4 post valve closed
6/27/2011	10:48:55 AM	Main Vac valve closed
6/27/2011	10:48:55 AM	Bypass valve closed
6/27/2011	10:48:55 AM	Bubbler valve closed
6/27/2011	10:48:55 AM	Helium MFC set to  0.000000
6/27/2011	10:48:55 AM	H2 MFC set to  0.000000
6/27/2011	10:48:55 AM	BCl3 MFC set to  0.000000
6/27/2011	10:48:55 AM	PHl3 MFC set to  0.000000
6/27/2011	10:48:55 AM	SiCl4 MFC set to  0.000000
6/27/2011	10:48:55 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	10:48:55 AM	Tube furnace set to 0
6/27/2011	10:48:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	10:48:58 AM	Recipe started at 10:48 AM
6/27/2011	10:48:58 AM	Run finished at 10:48 AM
6/27/2011	10:49:16 AM	Program started after a nonstandard shutdown
6/27/2011	10:49:16 AM	Helium valve closed
6/27/2011	10:49:16 AM	H2 valve closed
6/27/2011	10:49:16 AM	BCl3 valve closed
6/27/2011	10:49:16 AM	PH3 valve closed
6/27/2011	10:49:16 AM	SiCl4 pre valve closed
6/27/2011	10:49:16 AM	SiCl4 post valve closed
6/27/2011	10:49:16 AM	Main Vac valve closed
6/27/2011	10:49:16 AM	Bypass valve closed
6/27/2011	10:49:16 AM	Bubbler valve closed
6/27/2011	10:49:16 AM	Helium MFC set to  0.000000
6/27/2011	10:49:16 AM	H2 MFC set to  0.000000
6/27/2011	10:49:16 AM	BCl3 MFC set to  0.000000
6/27/2011	10:49:16 AM	PHl3 MFC set to  0.000000
6/27/2011	10:49:16 AM	SiCl4 MFC set to  0.000000
6/27/2011	10:49:16 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	10:49:17 AM	Tube furnace set to 0
6/27/2011	10:49:18 AM	Bypass valve opened
6/27/2011	10:49:19 AM	Bypass valve closed
6/27/2011	10:49:20 AM	Main Vac valve opened
6/27/2011	10:49:49 AM	Program exited cleanly
6/27/2011	10:56:35 AM	Program started normally
6/27/2011	10:56:35 AM	Helium valve closed
6/27/2011	10:56:35 AM	H2 valve closed
6/27/2011	10:56:35 AM	BCl3 valve closed
6/27/2011	10:56:35 AM	PH3 valve closed
6/27/2011	10:56:35 AM	SiCl4 pre valve closed
6/27/2011	10:56:35 AM	SiCl4 post valve closed
6/27/2011	10:56:35 AM	Main Vac valve closed
6/27/2011	10:56:35 AM	Bypass valve closed
6/27/2011	10:56:35 AM	Bubbler valve closed
6/27/2011	10:56:35 AM	Helium MFC set to  0.000000
6/27/2011	10:56:35 AM	H2 MFC set to  0.000000
6/27/2011	10:56:35 AM	BCl3 MFC set to  0.000000
6/27/2011	10:56:35 AM	PHl3 MFC set to  0.000000
6/27/2011	10:56:35 AM	SiCl4 MFC set to  0.000000
6/27/2011	10:56:35 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	10:56:35 AM	Tube furnace set to 0
6/27/2011	10:56:37 AM	Main Vac valve opened
6/27/2011	10:56:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	10:56:39 AM	Recipe started at 10:56 AM
6/27/2011	10:56:39 AM	Run finished at 10:56 AM
6/27/2011	10:57:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	10:57:19 AM	Main Vac valve opened
6/27/2011	10:57:20 AM	Main Vac valve closed
6/27/2011	10:57:22 AM	Main Vac valve opened
6/27/2011	10:58:20 AM	Program exited cleanly
6/27/2011	10:58:30 AM	Program started normally
6/27/2011	10:58:30 AM	Helium valve closed
6/27/2011	10:58:30 AM	H2 valve closed
6/27/2011	10:58:30 AM	BCl3 valve closed
6/27/2011	10:58:30 AM	PH3 valve closed
6/27/2011	10:58:30 AM	SiCl4 pre valve closed
6/27/2011	10:58:30 AM	SiCl4 post valve closed
6/27/2011	10:58:30 AM	Main Vac valve closed
6/27/2011	10:58:30 AM	Bypass valve closed
6/27/2011	10:58:30 AM	Bubbler valve closed
6/27/2011	10:58:30 AM	Helium MFC set to  0.000000
6/27/2011	10:58:30 AM	H2 MFC set to  0.000000
6/27/2011	10:58:30 AM	BCl3 MFC set to  0.000000
6/27/2011	10:58:30 AM	PHl3 MFC set to  0.000000
6/27/2011	10:58:30 AM	SiCl4 MFC set to  0.000000
6/27/2011	10:58:30 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	10:58:31 AM	Tube furnace set to 0
6/27/2011	10:58:49 AM	Program exited cleanly
6/27/2011	10:58:52 AM	Program started normally
6/27/2011	10:58:52 AM	Helium valve closed
6/27/2011	10:58:52 AM	H2 valve closed
6/27/2011	10:58:52 AM	BCl3 valve closed
6/27/2011	10:58:52 AM	PH3 valve closed
6/27/2011	10:58:52 AM	SiCl4 pre valve closed
6/27/2011	10:58:52 AM	SiCl4 post valve closed
6/27/2011	10:58:52 AM	Main Vac valve closed
6/27/2011	10:58:52 AM	Bypass valve closed
6/27/2011	10:58:52 AM	Bubbler valve closed
6/27/2011	10:58:52 AM	Helium MFC set to  0.000000
6/27/2011	10:58:52 AM	H2 MFC set to  0.000000
6/27/2011	10:58:52 AM	BCl3 MFC set to  0.000000
6/27/2011	10:58:52 AM	PHl3 MFC set to  0.000000
6/27/2011	10:58:52 AM	SiCl4 MFC set to  0.000000
6/27/2011	10:58:52 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	10:58:52 AM	Tube furnace set to 0
6/27/2011	10:58:53 AM	Main Vac valve opened
6/27/2011	10:58:55 AM	Program exited cleanly
6/27/2011	11:01:58 AM	Program started normally
6/27/2011	11:01:58 AM	Helium valve closed
6/27/2011	11:01:58 AM	H2 valve closed
6/27/2011	11:01:58 AM	BCl3 valve closed
6/27/2011	11:01:58 AM	PH3 valve closed
6/27/2011	11:01:58 AM	SiCl4 pre valve closed
6/27/2011	11:01:58 AM	SiCl4 post valve closed
6/27/2011	11:01:58 AM	Main Vac valve closed
6/27/2011	11:01:58 AM	Bypass valve closed
6/27/2011	11:01:58 AM	Bubbler valve closed
6/27/2011	11:01:58 AM	Helium MFC set to  0.000000
6/27/2011	11:01:58 AM	H2 MFC set to  0.000000
6/27/2011	11:01:58 AM	BCl3 MFC set to  0.000000
6/27/2011	11:01:58 AM	PHl3 MFC set to  0.000000
6/27/2011	11:01:58 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:01:58 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	11:01:58 AM	Tube furnace set to 0
6/27/2011	11:02:00 AM	Main Vac valve opened
6/27/2011	11:02:25 AM	Program exited cleanly
6/27/2011	11:02:28 AM	Program started normally
6/27/2011	11:02:28 AM	Helium valve closed
6/27/2011	11:02:28 AM	H2 valve closed
6/27/2011	11:02:28 AM	BCl3 valve closed
6/27/2011	11:02:28 AM	PH3 valve closed
6/27/2011	11:02:28 AM	SiCl4 pre valve closed
6/27/2011	11:02:28 AM	SiCl4 post valve closed
6/27/2011	11:02:28 AM	Main Vac valve closed
6/27/2011	11:02:28 AM	Bypass valve closed
6/27/2011	11:02:28 AM	Bubbler valve closed
6/27/2011	11:02:28 AM	Helium MFC set to  0.000000
6/27/2011	11:02:28 AM	H2 MFC set to  0.000000
6/27/2011	11:02:28 AM	BCl3 MFC set to  0.000000
6/27/2011	11:02:28 AM	PHl3 MFC set to  0.000000
6/27/2011	11:02:28 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:02:28 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	11:02:29 AM	Tube furnace set to 0
6/27/2011	11:03:28 AM	Program exited cleanly
6/27/2011	11:03:49 AM	Program started normally
6/27/2011	11:03:49 AM	Helium valve closed
6/27/2011	11:03:49 AM	H2 valve closed
6/27/2011	11:03:49 AM	BCl3 valve closed
6/27/2011	11:03:49 AM	PH3 valve closed
6/27/2011	11:03:49 AM	SiCl4 pre valve closed
6/27/2011	11:03:49 AM	SiCl4 post valve closed
6/27/2011	11:03:49 AM	Main Vac valve closed
6/27/2011	11:03:49 AM	Bypass valve closed
6/27/2011	11:03:49 AM	Bubbler valve closed
6/27/2011	11:03:49 AM	Helium MFC set to  0.000000
6/27/2011	11:03:49 AM	H2 MFC set to  0.000000
6/27/2011	11:03:49 AM	BCl3 MFC set to  0.000000
6/27/2011	11:03:49 AM	PHl3 MFC set to  0.000000
6/27/2011	11:03:49 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:03:49 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	11:03:49 AM	Tube furnace set to 0
6/27/2011	11:03:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2011	11:03:53 AM	Recipe started at 11:03 AM
6/27/2011	11:03:53 AM	Run finished at 11:03 AM
6/27/2011	11:04:14 AM	Program started after a nonstandard shutdown
6/27/2011	11:04:14 AM	Helium valve closed
6/27/2011	11:04:14 AM	H2 valve closed
6/27/2011	11:04:14 AM	BCl3 valve closed
6/27/2011	11:04:14 AM	PH3 valve closed
6/27/2011	11:04:14 AM	SiCl4 pre valve closed
6/27/2011	11:04:14 AM	SiCl4 post valve closed
6/27/2011	11:04:14 AM	Main Vac valve closed
6/27/2011	11:04:14 AM	Bypass valve closed
6/27/2011	11:04:14 AM	Bubbler valve closed
6/27/2011	11:04:14 AM	Helium MFC set to  0.000000
6/27/2011	11:04:14 AM	H2 MFC set to  0.000000
6/27/2011	11:04:14 AM	BCl3 MFC set to  0.000000
6/27/2011	11:04:14 AM	PHl3 MFC set to  0.000000
6/27/2011	11:04:14 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:04:14 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	11:04:15 AM	Tube furnace set to 0
6/27/2011	11:04:25 AM	Program exited cleanly
6/27/2011	11:07:56 AM	Program started normally
6/27/2011	11:07:56 AM	Helium valve closed
6/27/2011	11:07:56 AM	H2 valve closed
6/27/2011	11:07:56 AM	BCl3 valve closed
6/27/2011	11:07:56 AM	PH3 valve closed
6/27/2011	11:07:56 AM	SiCl4 pre valve closed
6/27/2011	11:07:56 AM	SiCl4 post valve closed
6/27/2011	11:07:56 AM	Main Vac valve closed
6/27/2011	11:07:56 AM	Bypass valve closed
6/27/2011	11:07:56 AM	Bubbler valve closed
6/27/2011	11:07:56 AM	Helium MFC set to  0.000000
6/27/2011	11:07:56 AM	H2 MFC set to  0.000000
6/27/2011	11:07:56 AM	BCl3 MFC set to  0.000000
6/27/2011	11:07:56 AM	PHl3 MFC set to  0.000000
6/27/2011	11:07:56 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:07:56 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	11:07:56 AM	Tube furnace set to 0
6/27/2011	11:07:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2011	11:08:00 AM	Recipe started at 11:07 AM
6/27/2011	11:08:00 AM	Run finished at 11:08 AM
6/27/2011	11:08:54 AM	Program started after a nonstandard shutdown
6/27/2011	11:08:54 AM	Helium valve closed
6/27/2011	11:08:54 AM	H2 valve closed
6/27/2011	11:08:54 AM	BCl3 valve closed
6/27/2011	11:08:54 AM	PH3 valve closed
6/27/2011	11:08:54 AM	SiCl4 pre valve closed
6/27/2011	11:08:54 AM	SiCl4 post valve closed
6/27/2011	11:08:54 AM	Main Vac valve closed
6/27/2011	11:08:54 AM	Bypass valve closed
6/27/2011	11:08:54 AM	Bubbler valve closed
6/27/2011	11:08:54 AM	Helium MFC set to  0.000000
6/27/2011	11:08:54 AM	H2 MFC set to  0.000000
6/27/2011	11:08:54 AM	BCl3 MFC set to  0.000000
6/27/2011	11:08:54 AM	PHl3 MFC set to  0.000000
6/27/2011	11:08:54 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:08:54 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	11:08:54 AM	Tube furnace set to 0
6/27/2011	11:08:57 AM	Program exited cleanly
6/27/2011	11:08:58 AM	Program started normally
6/27/2011	11:08:58 AM	Helium valve closed
6/27/2011	11:08:58 AM	H2 valve closed
6/27/2011	11:08:58 AM	BCl3 valve closed
6/27/2011	11:08:58 AM	PH3 valve closed
6/27/2011	11:08:58 AM	SiCl4 pre valve closed
6/27/2011	11:08:58 AM	SiCl4 post valve closed
6/27/2011	11:08:58 AM	Main Vac valve closed
6/27/2011	11:08:58 AM	Bypass valve closed
6/27/2011	11:08:58 AM	Bubbler valve closed
6/27/2011	11:08:58 AM	Helium MFC set to  0.000000
6/27/2011	11:08:58 AM	H2 MFC set to  0.000000
6/27/2011	11:08:58 AM	BCl3 MFC set to  0.000000
6/27/2011	11:08:58 AM	PHl3 MFC set to  0.000000
6/27/2011	11:08:58 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:08:58 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	11:08:58 AM	Tube furnace set to 0
6/27/2011	11:09:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2011	11:09:01 AM	Recipe started at 11:09 AM
6/27/2011	11:09:01 AM	Run finished at 11:09 AM
6/27/2011	11:09:46 AM	Program started after a nonstandard shutdown
6/27/2011	11:09:46 AM	Helium valve closed
6/27/2011	11:09:46 AM	H2 valve closed
6/27/2011	11:09:46 AM	BCl3 valve closed
6/27/2011	11:09:46 AM	PH3 valve closed
6/27/2011	11:09:46 AM	SiCl4 pre valve closed
6/27/2011	11:09:46 AM	SiCl4 post valve closed
6/27/2011	11:09:46 AM	Main Vac valve closed
6/27/2011	11:09:46 AM	Bypass valve closed
6/27/2011	11:09:46 AM	Bubbler valve closed
6/27/2011	11:09:46 AM	Helium MFC set to  0.000000
6/27/2011	11:09:46 AM	H2 MFC set to  0.000000
6/27/2011	11:09:46 AM	BCl3 MFC set to  0.000000
6/27/2011	11:09:46 AM	PHl3 MFC set to  0.000000
6/27/2011	11:09:46 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:09:46 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	11:09:46 AM	Tube furnace set to 0
6/27/2011	11:09:50 AM	Main Vac valve opened
6/27/2011	11:10:03 AM	Program exited cleanly
6/27/2011	11:10:05 AM	Program started normally
6/27/2011	11:10:05 AM	Helium valve closed
6/27/2011	11:10:05 AM	H2 valve closed
6/27/2011	11:10:05 AM	BCl3 valve closed
6/27/2011	11:10:05 AM	PH3 valve closed
6/27/2011	11:10:05 AM	SiCl4 pre valve closed
6/27/2011	11:10:05 AM	SiCl4 post valve closed
6/27/2011	11:10:05 AM	Main Vac valve closed
6/27/2011	11:10:05 AM	Bypass valve closed
6/27/2011	11:10:05 AM	Bubbler valve closed
6/27/2011	11:10:05 AM	Helium MFC set to  0.000000
6/27/2011	11:10:05 AM	H2 MFC set to  0.000000
6/27/2011	11:10:05 AM	BCl3 MFC set to  0.000000
6/27/2011	11:10:05 AM	PHl3 MFC set to  0.000000
6/27/2011	11:10:05 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:10:05 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	11:10:05 AM	Tube furnace set to 0
6/27/2011	11:10:07 AM	Main Vac valve opened
6/27/2011	11:10:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2011	11:10:13 AM	Recipe started at 11:10 AM
6/27/2011	11:10:13 AM	Run finished at 11:10 AM
6/27/2011	11:12:36 AM	Program started after a nonstandard shutdown
6/27/2011	11:12:36 AM	Helium valve closed
6/27/2011	11:12:36 AM	H2 valve closed
6/27/2011	11:12:36 AM	BCl3 valve closed
6/27/2011	11:12:36 AM	PH3 valve closed
6/27/2011	11:12:36 AM	SiCl4 pre valve closed
6/27/2011	11:12:36 AM	SiCl4 post valve closed
6/27/2011	11:12:36 AM	Main Vac valve closed
6/27/2011	11:12:36 AM	Bypass valve closed
6/27/2011	11:12:36 AM	Bubbler valve closed
6/27/2011	11:12:36 AM	Helium MFC set to  0.000000
6/27/2011	11:12:36 AM	H2 MFC set to  0.000000
6/27/2011	11:12:36 AM	BCl3 MFC set to  0.000000
6/27/2011	11:12:36 AM	PHl3 MFC set to  0.000000
6/27/2011	11:12:36 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:12:36 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	11:12:36 AM	Tube furnace set to 0
6/27/2011	11:12:38 AM	Main Vac valve opened
6/27/2011	11:12:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2011	11:12:40 AM	Recipe started at 11:12 AM
6/27/2011	11:12:40 AM	Run finished at 11:12 AM
6/27/2011	11:12:57 AM	Program started after a nonstandard shutdown
6/27/2011	11:12:57 AM	Helium valve closed
6/27/2011	11:12:57 AM	H2 valve closed
6/27/2011	11:12:57 AM	BCl3 valve closed
6/27/2011	11:12:57 AM	PH3 valve closed
6/27/2011	11:12:57 AM	SiCl4 pre valve closed
6/27/2011	11:12:57 AM	SiCl4 post valve closed
6/27/2011	11:12:57 AM	Main Vac valve closed
6/27/2011	11:12:57 AM	Bypass valve closed
6/27/2011	11:12:57 AM	Bubbler valve closed
6/27/2011	11:12:57 AM	Helium MFC set to  0.000000
6/27/2011	11:12:57 AM	H2 MFC set to  0.000000
6/27/2011	11:12:57 AM	BCl3 MFC set to  0.000000
6/27/2011	11:12:57 AM	PHl3 MFC set to  0.000000
6/27/2011	11:12:57 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:12:57 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	11:12:57 AM	Tube furnace set to 0
6/27/2011	11:12:58 AM	Main Vac valve opened
6/27/2011	11:13:02 AM	Program exited cleanly
6/27/2011	11:14:42 AM	Program started normally
6/27/2011	11:14:42 AM	Helium valve closed
6/27/2011	11:14:42 AM	H2 valve closed
6/27/2011	11:14:42 AM	BCl3 valve closed
6/27/2011	11:14:42 AM	PH3 valve closed
6/27/2011	11:14:42 AM	SiCl4 pre valve closed
6/27/2011	11:14:42 AM	SiCl4 post valve closed
6/27/2011	11:14:42 AM	Main Vac valve closed
6/27/2011	11:14:42 AM	Bypass valve closed
6/27/2011	11:14:42 AM	Bubbler valve closed
6/27/2011	11:14:42 AM	Helium MFC set to  0.000000
6/27/2011	11:14:42 AM	H2 MFC set to  0.000000
6/27/2011	11:14:42 AM	BCl3 MFC set to  0.000000
6/27/2011	11:14:42 AM	PHl3 MFC set to  0.000000
6/27/2011	11:14:42 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:14:42 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	11:14:43 AM	Tube furnace set to 0
6/27/2011	11:14:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2011	11:14:45 AM	Recipe started at 11:14 AM
6/27/2011	11:14:45 AM	Run finished at 11:14 AM
6/27/2011	11:15:24 AM	Program started after a nonstandard shutdown
6/27/2011	11:15:24 AM	Helium valve closed
6/27/2011	11:15:24 AM	H2 valve closed
6/27/2011	11:15:24 AM	BCl3 valve closed
6/27/2011	11:15:24 AM	PH3 valve closed
6/27/2011	11:15:24 AM	SiCl4 pre valve closed
6/27/2011	11:15:24 AM	SiCl4 post valve closed
6/27/2011	11:15:24 AM	Main Vac valve closed
6/27/2011	11:15:24 AM	Bypass valve closed
6/27/2011	11:15:24 AM	Bubbler valve closed
6/27/2011	11:15:24 AM	Helium MFC set to  0.000000
6/27/2011	11:15:24 AM	H2 MFC set to  0.000000
6/27/2011	11:15:24 AM	BCl3 MFC set to  0.000000
6/27/2011	11:15:24 AM	PHl3 MFC set to  0.000000
6/27/2011	11:15:24 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:15:24 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	11:15:24 AM	Tube furnace set to 0
6/27/2011	11:15:25 AM	Main Vac valve opened
6/27/2011	11:15:30 AM	Recipe started at 11:15 AM
6/27/2011	11:15:30 AM	Helium valve closed
6/27/2011	11:15:30 AM	H2 valve closed
6/27/2011	11:15:30 AM	BCl3 valve closed
6/27/2011	11:15:30 AM	PH3 valve closed
6/27/2011	11:15:30 AM	SiCl4 pre valve closed
6/27/2011	11:15:30 AM	SiCl4 post valve closed
6/27/2011	11:15:30 AM	Bypass valve closed
6/27/2011	11:15:30 AM	Bubbler valve closed
6/27/2011	11:15:30 AM	Main Vac valve opened
6/27/2011	11:15:30 AM	Helium MFC set to  0.000000
6/27/2011	11:15:30 AM	H2 MFC set to  0.000000
6/27/2011	11:15:30 AM	BCl3 MFC set to  0.000000
6/27/2011	11:15:30 AM	PHl3 MFC set to  0.000000
6/27/2011	11:15:30 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:15:30 AM	Bypass solenoid MFC set to  0.000000
6/27/2011	11:15:30 AM	Tube furnace set to 0
6/27/2011	11:15:30 AM	Run finished at 11:15 AM
6/27/2011	11:15:47 AM	Program exited cleanly
6/27/2011	11:17:30 AM	Program started normally
6/27/2011	11:17:30 AM	Helium valve closed
6/27/2011	11:17:30 AM	H2 valve closed
6/27/2011	11:17:30 AM	BCl3 valve closed
6/27/2011	11:17:30 AM	PH3 valve closed
6/27/2011	11:17:30 AM	SiCl4 pre valve closed
6/27/2011	11:17:30 AM	SiCl4 post valve closed
6/27/2011	11:17:30 AM	Main Vac valve closed
6/27/2011	11:17:30 AM	Bypass valve closed
6/27/2011	11:17:30 AM	Bubbler valve closed
6/27/2011	11:17:30 AM	Helium MFC set to  0.000000
6/27/2011	11:17:30 AM	H2 MFC set to  0.000000
6/27/2011	11:17:30 AM	BCl3 MFC set to  0.000000
6/27/2011	11:17:30 AM	PHl3 MFC set to  0.000000
6/27/2011	11:17:30 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:17:30 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	11:17:30 AM	Tube furnace set to 0
6/27/2011	11:17:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2011	11:17:35 AM	Recipe started at 11:17 AM
6/27/2011	11:17:35 AM	Run finished at 11:17 AM
6/27/2011	11:17:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2011	11:17:48 AM	Main Vac valve opened
6/27/2011	11:17:50 AM	Program exited cleanly
6/27/2011	11:18:27 AM	Program started normally
6/27/2011	11:18:27 AM	Helium valve closed
6/27/2011	11:18:27 AM	H2 valve closed
6/27/2011	11:18:27 AM	BCl3 valve closed
6/27/2011	11:18:27 AM	PH3 valve closed
6/27/2011	11:18:27 AM	SiCl4 pre valve closed
6/27/2011	11:18:27 AM	SiCl4 post valve closed
6/27/2011	11:18:27 AM	Main Vac valve closed
6/27/2011	11:18:27 AM	Bypass valve closed
6/27/2011	11:18:27 AM	Bubbler valve closed
6/27/2011	11:18:27 AM	Helium MFC set to  0.000000
6/27/2011	11:18:27 AM	H2 MFC set to  0.000000
6/27/2011	11:18:27 AM	BCl3 MFC set to  0.000000
6/27/2011	11:18:27 AM	PHl3 MFC set to  0.000000
6/27/2011	11:18:27 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:18:27 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	11:18:27 AM	Tube furnace set to 0
6/27/2011	11:18:31 AM	Main Vac valve opened
6/27/2011	11:18:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2011	11:18:33 AM	Recipe started at 11:18 AM
6/27/2011	11:18:33 AM	Run finished at 11:18 AM
6/27/2011	11:19:27 AM	Program started after a nonstandard shutdown
6/27/2011	11:19:27 AM	Helium valve closed
6/27/2011	11:19:27 AM	H2 valve closed
6/27/2011	11:19:27 AM	BCl3 valve closed
6/27/2011	11:19:27 AM	PH3 valve closed
6/27/2011	11:19:27 AM	SiCl4 pre valve closed
6/27/2011	11:19:27 AM	SiCl4 post valve closed
6/27/2011	11:19:27 AM	Main Vac valve closed
6/27/2011	11:19:27 AM	Bypass valve closed
6/27/2011	11:19:27 AM	Bubbler valve closed
6/27/2011	11:19:27 AM	Helium MFC set to  0.000000
6/27/2011	11:19:27 AM	H2 MFC set to  0.000000
6/27/2011	11:19:27 AM	BCl3 MFC set to  0.000000
6/27/2011	11:19:27 AM	PHl3 MFC set to  0.000000
6/27/2011	11:19:27 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:19:27 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	11:19:27 AM	Tube furnace set to 0
6/27/2011	11:19:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	11:19:32 AM	Recipe started at 11:19 AM
6/27/2011	11:19:32 AM	Run finished at 11:19 AM
6/27/2011	11:19:45 AM	Program started after a nonstandard shutdown
6/27/2011	11:19:45 AM	Helium valve closed
6/27/2011	11:19:45 AM	H2 valve closed
6/27/2011	11:19:45 AM	BCl3 valve closed
6/27/2011	11:19:45 AM	PH3 valve closed
6/27/2011	11:19:45 AM	SiCl4 pre valve closed
6/27/2011	11:19:45 AM	SiCl4 post valve closed
6/27/2011	11:19:45 AM	Main Vac valve closed
6/27/2011	11:19:45 AM	Bypass valve closed
6/27/2011	11:19:45 AM	Bubbler valve closed
6/27/2011	11:19:45 AM	Helium MFC set to  0.000000
6/27/2011	11:19:45 AM	H2 MFC set to  0.000000
6/27/2011	11:19:45 AM	BCl3 MFC set to  0.000000
6/27/2011	11:19:45 AM	PHl3 MFC set to  0.000000
6/27/2011	11:19:45 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:19:45 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	11:19:45 AM	Tube furnace set to 0
6/27/2011	11:19:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	11:19:55 AM	Recipe started at 11:19 AM
6/27/2011	11:19:55 AM	Run finished at 11:19 AM
6/27/2011	11:21:45 AM	Program started after a nonstandard shutdown
6/27/2011	11:21:45 AM	Helium valve closed
6/27/2011	11:21:45 AM	H2 valve closed
6/27/2011	11:21:45 AM	BCl3 valve closed
6/27/2011	11:21:45 AM	PH3 valve closed
6/27/2011	11:21:45 AM	SiCl4 pre valve closed
6/27/2011	11:21:45 AM	SiCl4 post valve closed
6/27/2011	11:21:45 AM	Main Vac valve closed
6/27/2011	11:21:45 AM	Bypass valve closed
6/27/2011	11:21:45 AM	Bubbler valve closed
6/27/2011	11:21:45 AM	Helium MFC set to  0.000000
6/27/2011	11:21:45 AM	H2 MFC set to  0.000000
6/27/2011	11:21:45 AM	BCl3 MFC set to  0.000000
6/27/2011	11:21:45 AM	PHl3 MFC set to  0.000000
6/27/2011	11:21:45 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:21:45 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	11:21:46 AM	Tube furnace set to 0
6/27/2011	11:21:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	11:21:51 AM	Recipe started at 11:21 AM
6/27/2011	11:21:51 AM	Run finished at 11:21 AM
6/27/2011	11:21:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	11:21:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2011	11:22:00 AM	Recipe started at 11:22 AM
6/27/2011	11:22:00 AM	Run finished at 11:22 AM
6/27/2011	11:22:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2011	11:22:13 AM	Recipe started at 11:22 AM
6/27/2011	11:22:13 AM	Helium valve closed
6/27/2011	11:22:13 AM	H2 valve closed
6/27/2011	11:22:13 AM	BCl3 valve closed
6/27/2011	11:22:13 AM	PH3 valve closed
6/27/2011	11:22:13 AM	SiCl4 pre valve closed
6/27/2011	11:22:13 AM	SiCl4 post valve closed
6/27/2011	11:22:13 AM	Bypass valve closed
6/27/2011	11:22:13 AM	Bubbler valve closed
6/27/2011	11:22:13 AM	Main Vac valve opened
6/27/2011	11:22:13 AM	Helium MFC set to  0.000000
6/27/2011	11:22:13 AM	H2 MFC set to  0.000000
6/27/2011	11:22:13 AM	BCl3 MFC set to  0.000000
6/27/2011	11:22:13 AM	PHl3 MFC set to  0.000000
6/27/2011	11:22:13 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:22:13 AM	Bypass solenoid MFC set to  0.000000
6/27/2011	11:22:13 AM	Tube furnace set to 0
6/27/2011	11:22:13 AM	Run finished at 11:22 AM
6/27/2011	11:22:29 AM	Program exited cleanly
6/27/2011	11:22:37 AM	Program started normally
6/27/2011	11:22:37 AM	Helium valve closed
6/27/2011	11:22:37 AM	H2 valve closed
6/27/2011	11:22:37 AM	BCl3 valve closed
6/27/2011	11:22:37 AM	PH3 valve closed
6/27/2011	11:22:37 AM	SiCl4 pre valve closed
6/27/2011	11:22:37 AM	SiCl4 post valve closed
6/27/2011	11:22:37 AM	Main Vac valve closed
6/27/2011	11:22:37 AM	Bypass valve closed
6/27/2011	11:22:37 AM	Bubbler valve closed
6/27/2011	11:22:37 AM	Helium MFC set to  0.000000
6/27/2011	11:22:37 AM	H2 MFC set to  0.000000
6/27/2011	11:22:37 AM	BCl3 MFC set to  0.000000
6/27/2011	11:22:37 AM	PHl3 MFC set to  0.000000
6/27/2011	11:22:37 AM	SiCl4 MFC set to  0.000000
6/27/2011	11:22:37 AM	Bypass solenoid MFC set to  760.000000
6/27/2011	11:22:37 AM	Tube furnace set to 0
6/27/2011	11:22:39 AM	Main Vac valve opened
6/27/2011	12:08:14 PM	Program exited cleanly
6/27/2011	12:08:16 PM	Program started normally
6/27/2011	12:08:16 PM	Helium valve closed
6/27/2011	12:08:16 PM	H2 valve closed
6/27/2011	12:08:16 PM	BCl3 valve closed
6/27/2011	12:08:16 PM	PH3 valve closed
6/27/2011	12:08:16 PM	SiCl4 pre valve closed
6/27/2011	12:08:16 PM	SiCl4 post valve closed
6/27/2011	12:08:16 PM	Main Vac valve closed
6/27/2011	12:08:16 PM	Bypass valve closed
6/27/2011	12:08:16 PM	Bubbler valve closed
6/27/2011	12:08:16 PM	Helium MFC set to  0.000000
6/27/2011	12:08:16 PM	H2 MFC set to  0.000000
6/27/2011	12:08:16 PM	BCl3 MFC set to  0.000000
6/27/2011	12:08:16 PM	PHl3 MFC set to  0.000000
6/27/2011	12:08:16 PM	SiCl4 MFC set to  0.000000
6/27/2011	12:08:16 PM	Bypass solenoid MFC set to  760.000000
6/27/2011	12:08:16 PM	Tube furnace set to 0
6/27/2011	12:08:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	12:08:23 PM	Recipe started at 12:08 PM
6/27/2011	12:08:23 PM	H2 valve closed
6/27/2011	12:08:23 PM	BCl3 valve closed
6/27/2011	12:08:23 PM	PH3 valve closed
6/27/2011	12:08:23 PM	SiCl4 pre valve closed
6/27/2011	12:08:23 PM	SiCl4 post valve closed
6/27/2011	12:08:23 PM	Main Vac valve closed
6/27/2011	12:08:23 PM	Bypass valve closed
6/27/2011	12:08:23 PM	Bubbler valve closed
6/27/2011	12:08:23 PM	Helium valve opened
6/27/2011	12:08:23 PM	Helium MFC set to  500.000000
6/27/2011	12:08:23 PM	H2 MFC set to  0.000000
6/27/2011	12:08:23 PM	BCl3 MFC set to  0.000000
6/27/2011	12:08:23 PM	PHl3 MFC set to  0.000000
6/27/2011	12:08:23 PM	SiCl4 MFC set to  0.000000
6/27/2011	12:08:23 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	12:08:23 PM	Tube furnace set to 0
6/27/2011	12:10:34 PM	Helium valve closed
6/27/2011	12:10:34 PM	H2 valve closed
6/27/2011	12:10:34 PM	BCl3 valve closed
6/27/2011	12:10:34 PM	PH3 valve closed
6/27/2011	12:10:34 PM	SiCl4 pre valve closed
6/27/2011	12:10:34 PM	SiCl4 post valve closed
6/27/2011	12:10:34 PM	Main Vac valve closed
6/27/2011	12:10:34 PM	Bypass valve closed
6/27/2011	12:10:34 PM	Bubbler valve closed
6/27/2011	12:10:34 PM	Helium MFC set to  0.000000
6/27/2011	12:10:34 PM	H2 MFC set to  0.000000
6/27/2011	12:10:34 PM	BCl3 MFC set to  0.000000
6/27/2011	12:10:34 PM	PHl3 MFC set to  0.000000
6/27/2011	12:10:34 PM	SiCl4 MFC set to  0.000000
6/27/2011	12:10:34 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	12:10:34 PM	Tube furnace set to 0
6/27/2011	12:10:35 PM	Run finished at 12:10 PM
6/27/2011	12:10:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	12:10:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2011	12:10:48 PM	Recipe started at 12:10 PM
6/27/2011	12:10:48 PM	Helium valve closed
6/27/2011	12:10:48 PM	H2 valve closed
6/27/2011	12:10:48 PM	BCl3 valve closed
6/27/2011	12:10:48 PM	PH3 valve closed
6/27/2011	12:10:48 PM	SiCl4 pre valve closed
6/27/2011	12:10:48 PM	SiCl4 post valve closed
6/27/2011	12:10:48 PM	Main Vac valve closed
6/27/2011	12:10:48 PM	Bubbler valve closed
6/27/2011	12:10:48 PM	Bypass valve opened
6/27/2011	12:10:48 PM	Helium MFC set to  0.000000
6/27/2011	12:10:48 PM	H2 MFC set to  0.000000
6/27/2011	12:10:48 PM	BCl3 MFC set to  0.000000
6/27/2011	12:10:48 PM	PHl3 MFC set to  0.000000
6/27/2011	12:10:48 PM	SiCl4 MFC set to  0.000000
6/27/2011	12:10:48 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	12:10:48 PM	Tube furnace set to 0
6/27/2011	12:14:16 PM	Helium valve closed
6/27/2011	12:14:16 PM	H2 valve closed
6/27/2011	12:14:16 PM	BCl3 valve closed
6/27/2011	12:14:16 PM	PH3 valve closed
6/27/2011	12:14:16 PM	SiCl4 pre valve closed
6/27/2011	12:14:16 PM	SiCl4 post valve closed
6/27/2011	12:14:16 PM	Main Vac valve closed
6/27/2011	12:14:16 PM	Bubbler valve closed
6/27/2011	12:14:16 PM	Bypass valve opened
6/27/2011	12:14:16 PM	Helium MFC set to  0.000000
6/27/2011	12:14:16 PM	H2 MFC set to  0.000000
6/27/2011	12:14:16 PM	BCl3 MFC set to  0.000000
6/27/2011	12:14:16 PM	PHl3 MFC set to  0.000000
6/27/2011	12:14:16 PM	SiCl4 MFC set to  0.000000
6/27/2011	12:14:16 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	12:14:16 PM	Tube furnace set to 0
6/27/2011	12:15:16 PM	Helium valve closed
6/27/2011	12:15:16 PM	H2 valve closed
6/27/2011	12:15:16 PM	BCl3 valve closed
6/27/2011	12:15:16 PM	PH3 valve closed
6/27/2011	12:15:16 PM	SiCl4 pre valve closed
6/27/2011	12:15:16 PM	SiCl4 post valve closed
6/27/2011	12:15:16 PM	Main Vac valve closed
6/27/2011	12:15:16 PM	Bubbler valve closed
6/27/2011	12:15:16 PM	Bypass valve opened
6/27/2011	12:15:16 PM	Helium MFC set to  0.000000
6/27/2011	12:15:16 PM	H2 MFC set to  0.000000
6/27/2011	12:15:16 PM	BCl3 MFC set to  0.000000
6/27/2011	12:15:16 PM	PHl3 MFC set to  0.000000
6/27/2011	12:15:16 PM	SiCl4 MFC set to  0.000000
6/27/2011	12:15:16 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	12:15:16 PM	Tube furnace set to 0
6/27/2011	12:15:17 PM	Run finished at 12:15 PM
6/27/2011	12:15:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2011	12:15:33 PM	Bypass valve closed
6/27/2011	12:15:33 PM	Main Vac valve opened
6/27/2011	1:30:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	1:30:20 PM	Recipe started at 1:30 PM
6/27/2011	1:30:20 PM	H2 valve closed
6/27/2011	1:30:20 PM	BCl3 valve closed
6/27/2011	1:30:20 PM	PH3 valve closed
6/27/2011	1:30:20 PM	SiCl4 pre valve closed
6/27/2011	1:30:20 PM	SiCl4 post valve closed
6/27/2011	1:30:20 PM	Main Vac valve closed
6/27/2011	1:30:20 PM	Bypass valve closed
6/27/2011	1:30:20 PM	Bubbler valve closed
6/27/2011	1:30:20 PM	Helium valve opened
6/27/2011	1:30:20 PM	Helium MFC set to  500.000000
6/27/2011	1:30:20 PM	H2 MFC set to  0.000000
6/27/2011	1:30:20 PM	BCl3 MFC set to  0.000000
6/27/2011	1:30:20 PM	PHl3 MFC set to  0.000000
6/27/2011	1:30:20 PM	SiCl4 MFC set to  0.000000
6/27/2011	1:30:20 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	1:30:20 PM	Tube furnace set to 0
6/27/2011	1:32:31 PM	Helium valve closed
6/27/2011	1:32:31 PM	H2 valve closed
6/27/2011	1:32:31 PM	BCl3 valve closed
6/27/2011	1:32:31 PM	PH3 valve closed
6/27/2011	1:32:31 PM	SiCl4 pre valve closed
6/27/2011	1:32:31 PM	SiCl4 post valve closed
6/27/2011	1:32:31 PM	Main Vac valve closed
6/27/2011	1:32:31 PM	Bypass valve closed
6/27/2011	1:32:31 PM	Bubbler valve closed
6/27/2011	1:32:31 PM	Helium MFC set to  0.000000
6/27/2011	1:32:31 PM	H2 MFC set to  0.000000
6/27/2011	1:32:31 PM	BCl3 MFC set to  0.000000
6/27/2011	1:32:31 PM	PHl3 MFC set to  0.000000
6/27/2011	1:32:31 PM	SiCl4 MFC set to  0.000000
6/27/2011	1:32:31 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	1:32:31 PM	Tube furnace set to 0
6/27/2011	1:32:32 PM	Run finished at 1:32 PM
6/27/2011	1:32:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	1:32:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/27/2011	1:32:47 PM	Recipe started at 1:32 PM
6/27/2011	1:32:47 PM	Helium valve closed
6/27/2011	1:32:47 PM	H2 valve closed
6/27/2011	1:32:47 PM	BCl3 valve closed
6/27/2011	1:32:47 PM	PH3 valve closed
6/27/2011	1:32:47 PM	SiCl4 pre valve closed
6/27/2011	1:32:47 PM	SiCl4 post valve closed
6/27/2011	1:32:47 PM	Main Vac valve closed
6/27/2011	1:32:47 PM	Bubbler valve closed
6/27/2011	1:32:47 PM	Bypass valve opened
6/27/2011	1:32:47 PM	Helium MFC set to  0.000000
6/27/2011	1:32:47 PM	H2 MFC set to  0.000000
6/27/2011	1:32:47 PM	BCl3 MFC set to  0.000000
6/27/2011	1:32:47 PM	PHl3 MFC set to  0.000000
6/27/2011	1:32:47 PM	SiCl4 MFC set to  0.000000
6/27/2011	1:32:47 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	1:32:47 PM	Tube furnace set to 0
6/27/2011	1:32:53 PM	Run aborted at 1:32 PM
6/27/2011	1:32:53 PM	Helium valve closed
6/27/2011	1:32:53 PM	H2 valve closed
6/27/2011	1:32:53 PM	BCl3 valve closed
6/27/2011	1:32:53 PM	PH3 valve closed
6/27/2011	1:32:53 PM	SiCl4 pre valve closed
6/27/2011	1:32:53 PM	SiCl4 post valve closed
6/27/2011	1:32:53 PM	Bypass valve closed
6/27/2011	1:32:53 PM	Main Vac valve closed
6/27/2011	1:32:53 PM	Bubbler valve closed
6/27/2011	1:32:53 PM	Helium MFC set to  0.000000
6/27/2011	1:32:53 PM	H2 MFC set to  0.000000
6/27/2011	1:32:53 PM	BCl3 MFC set to  0.000000
6/27/2011	1:32:53 PM	PHl3 MFC set to  0.000000
6/27/2011	1:32:53 PM	SiCl4 MFC set to  0.000000
6/27/2011	1:32:53 PM	Tube furnace set to 0
6/27/2011	1:32:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/27/2011	1:32:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	1:32:55 PM	Recipe started at 1:32 PM
6/27/2011	1:32:55 PM	H2 valve closed
6/27/2011	1:32:55 PM	BCl3 valve closed
6/27/2011	1:32:55 PM	PH3 valve closed
6/27/2011	1:32:55 PM	SiCl4 pre valve closed
6/27/2011	1:32:55 PM	SiCl4 post valve closed
6/27/2011	1:32:55 PM	Main Vac valve closed
6/27/2011	1:32:55 PM	Bypass valve closed
6/27/2011	1:32:55 PM	Bubbler valve closed
6/27/2011	1:32:55 PM	Helium valve opened
6/27/2011	1:32:55 PM	Helium MFC set to  500.000000
6/27/2011	1:32:55 PM	H2 MFC set to  0.000000
6/27/2011	1:32:55 PM	BCl3 MFC set to  0.000000
6/27/2011	1:32:55 PM	PHl3 MFC set to  0.000000
6/27/2011	1:32:55 PM	SiCl4 MFC set to  0.000000
6/27/2011	1:32:55 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	1:32:55 PM	Tube furnace set to 0
6/27/2011	1:33:18 PM	Run aborted at 1:33 PM
6/27/2011	1:33:18 PM	Helium valve closed
6/27/2011	1:33:18 PM	H2 valve closed
6/27/2011	1:33:18 PM	BCl3 valve closed
6/27/2011	1:33:18 PM	PH3 valve closed
6/27/2011	1:33:18 PM	SiCl4 pre valve closed
6/27/2011	1:33:18 PM	SiCl4 post valve closed
6/27/2011	1:33:18 PM	Bypass valve closed
6/27/2011	1:33:18 PM	Main Vac valve closed
6/27/2011	1:33:18 PM	Bubbler valve closed
6/27/2011	1:33:18 PM	Helium MFC set to  0.000000
6/27/2011	1:33:18 PM	H2 MFC set to  0.000000
6/27/2011	1:33:18 PM	BCl3 MFC set to  0.000000
6/27/2011	1:33:18 PM	PHl3 MFC set to  0.000000
6/27/2011	1:33:18 PM	SiCl4 MFC set to  0.000000
6/27/2011	1:33:18 PM	Tube furnace set to 0
6/27/2011	1:33:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	1:33:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/27/2011	1:33:28 PM	Recipe started at 1:33 PM
6/27/2011	1:33:28 PM	Helium valve closed
6/27/2011	1:33:28 PM	H2 valve closed
6/27/2011	1:33:28 PM	BCl3 valve closed
6/27/2011	1:33:28 PM	PH3 valve closed
6/27/2011	1:33:28 PM	SiCl4 pre valve closed
6/27/2011	1:33:28 PM	SiCl4 post valve closed
6/27/2011	1:33:28 PM	Main Vac valve closed
6/27/2011	1:33:28 PM	Bubbler valve closed
6/27/2011	1:33:28 PM	Bypass valve opened
6/27/2011	1:33:28 PM	Helium MFC set to  0.000000
6/27/2011	1:33:28 PM	H2 MFC set to  0.000000
6/27/2011	1:33:28 PM	BCl3 MFC set to  0.000000
6/27/2011	1:33:28 PM	PHl3 MFC set to  0.000000
6/27/2011	1:33:28 PM	SiCl4 MFC set to  0.000000
6/27/2011	1:33:28 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	1:33:28 PM	Tube furnace set to 0
6/27/2011	1:33:32 PM	Run aborted at 1:33 PM
6/27/2011	1:33:32 PM	Helium valve closed
6/27/2011	1:33:32 PM	H2 valve closed
6/27/2011	1:33:32 PM	BCl3 valve closed
6/27/2011	1:33:32 PM	PH3 valve closed
6/27/2011	1:33:32 PM	SiCl4 pre valve closed
6/27/2011	1:33:32 PM	SiCl4 post valve closed
6/27/2011	1:33:32 PM	Bypass valve closed
6/27/2011	1:33:32 PM	Main Vac valve closed
6/27/2011	1:33:32 PM	Bubbler valve closed
6/27/2011	1:33:32 PM	Helium MFC set to  0.000000
6/27/2011	1:33:32 PM	H2 MFC set to  0.000000
6/27/2011	1:33:32 PM	BCl3 MFC set to  0.000000
6/27/2011	1:33:32 PM	PHl3 MFC set to  0.000000
6/27/2011	1:33:32 PM	SiCl4 MFC set to  0.000000
6/27/2011	1:33:32 PM	Tube furnace set to 0
6/27/2011	1:33:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/27/2011	1:33:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	1:33:35 PM	Recipe started at 1:33 PM
6/27/2011	1:33:35 PM	H2 valve closed
6/27/2011	1:33:35 PM	BCl3 valve closed
6/27/2011	1:33:35 PM	PH3 valve closed
6/27/2011	1:33:35 PM	SiCl4 pre valve closed
6/27/2011	1:33:35 PM	SiCl4 post valve closed
6/27/2011	1:33:35 PM	Main Vac valve closed
6/27/2011	1:33:35 PM	Bypass valve closed
6/27/2011	1:33:35 PM	Bubbler valve closed
6/27/2011	1:33:35 PM	Helium valve opened
6/27/2011	1:33:35 PM	Helium MFC set to  500.000000
6/27/2011	1:33:35 PM	H2 MFC set to  0.000000
6/27/2011	1:33:35 PM	BCl3 MFC set to  0.000000
6/27/2011	1:33:35 PM	PHl3 MFC set to  0.000000
6/27/2011	1:33:35 PM	SiCl4 MFC set to  0.000000
6/27/2011	1:33:35 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	1:33:35 PM	Tube furnace set to 0
6/27/2011	1:33:49 PM	Run aborted at 1:33 PM
6/27/2011	1:33:49 PM	Helium valve closed
6/27/2011	1:33:49 PM	H2 valve closed
6/27/2011	1:33:49 PM	BCl3 valve closed
6/27/2011	1:33:49 PM	PH3 valve closed
6/27/2011	1:33:49 PM	SiCl4 pre valve closed
6/27/2011	1:33:49 PM	SiCl4 post valve closed
6/27/2011	1:33:49 PM	Bypass valve closed
6/27/2011	1:33:49 PM	Main Vac valve closed
6/27/2011	1:33:49 PM	Bubbler valve closed
6/27/2011	1:33:49 PM	Helium MFC set to  0.000000
6/27/2011	1:33:49 PM	H2 MFC set to  0.000000
6/27/2011	1:33:49 PM	BCl3 MFC set to  0.000000
6/27/2011	1:33:49 PM	PHl3 MFC set to  0.000000
6/27/2011	1:33:49 PM	SiCl4 MFC set to  0.000000
6/27/2011	1:33:49 PM	Tube furnace set to 0
6/27/2011	1:33:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	1:34:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	1:34:29 PM	Recipe started at 1:34 PM
6/27/2011	1:34:29 PM	H2 valve closed
6/27/2011	1:34:29 PM	BCl3 valve closed
6/27/2011	1:34:29 PM	PH3 valve closed
6/27/2011	1:34:29 PM	SiCl4 pre valve closed
6/27/2011	1:34:29 PM	SiCl4 post valve closed
6/27/2011	1:34:29 PM	Main Vac valve closed
6/27/2011	1:34:29 PM	Bypass valve closed
6/27/2011	1:34:29 PM	Bubbler valve closed
6/27/2011	1:34:29 PM	Helium valve opened
6/27/2011	1:34:29 PM	Helium MFC set to  500.000000
6/27/2011	1:34:29 PM	H2 MFC set to  0.000000
6/27/2011	1:34:29 PM	BCl3 MFC set to  0.000000
6/27/2011	1:34:29 PM	PHl3 MFC set to  0.000000
6/27/2011	1:34:29 PM	SiCl4 MFC set to  0.000000
6/27/2011	1:34:29 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	1:34:29 PM	Tube furnace set to 0
6/27/2011	1:35:37 PM	Helium valve closed
6/27/2011	1:35:37 PM	H2 valve closed
6/27/2011	1:35:37 PM	BCl3 valve closed
6/27/2011	1:35:37 PM	PH3 valve closed
6/27/2011	1:35:37 PM	SiCl4 pre valve closed
6/27/2011	1:35:37 PM	SiCl4 post valve closed
6/27/2011	1:35:37 PM	Main Vac valve closed
6/27/2011	1:35:37 PM	Bypass valve closed
6/27/2011	1:35:37 PM	Bubbler valve closed
6/27/2011	1:35:37 PM	Helium MFC set to  0.000000
6/27/2011	1:35:37 PM	H2 MFC set to  0.000000
6/27/2011	1:35:37 PM	BCl3 MFC set to  0.000000
6/27/2011	1:35:37 PM	PHl3 MFC set to  0.000000
6/27/2011	1:35:37 PM	SiCl4 MFC set to  0.000000
6/27/2011	1:35:37 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	1:35:37 PM	Tube furnace set to 0
6/27/2011	1:35:38 PM	Run finished at 1:35 PM
6/27/2011	1:35:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	1:35:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2011	1:35:58 PM	Recipe started at 1:35 PM
6/27/2011	1:35:58 PM	Helium valve closed
6/27/2011	1:35:58 PM	H2 valve closed
6/27/2011	1:35:58 PM	BCl3 valve closed
6/27/2011	1:35:58 PM	PH3 valve closed
6/27/2011	1:35:58 PM	SiCl4 pre valve closed
6/27/2011	1:35:58 PM	SiCl4 post valve closed
6/27/2011	1:35:58 PM	Main Vac valve closed
6/27/2011	1:35:58 PM	Bubbler valve closed
6/27/2011	1:35:58 PM	Bypass valve opened
6/27/2011	1:35:58 PM	Helium MFC set to  0.000000
6/27/2011	1:35:58 PM	H2 MFC set to  0.000000
6/27/2011	1:35:58 PM	BCl3 MFC set to  0.000000
6/27/2011	1:35:58 PM	PHl3 MFC set to  0.000000
6/27/2011	1:35:58 PM	SiCl4 MFC set to  0.000000
6/27/2011	1:35:58 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	1:35:58 PM	Tube furnace set to 0
6/27/2011	1:38:47 PM	Helium valve closed
6/27/2011	1:38:47 PM	H2 valve closed
6/27/2011	1:38:47 PM	BCl3 valve closed
6/27/2011	1:38:47 PM	PH3 valve closed
6/27/2011	1:38:47 PM	SiCl4 pre valve closed
6/27/2011	1:38:47 PM	SiCl4 post valve closed
6/27/2011	1:38:47 PM	Main Vac valve closed
6/27/2011	1:38:47 PM	Bubbler valve closed
6/27/2011	1:38:47 PM	Bypass valve opened
6/27/2011	1:38:47 PM	Helium MFC set to  0.000000
6/27/2011	1:38:47 PM	H2 MFC set to  0.000000
6/27/2011	1:38:47 PM	BCl3 MFC set to  0.000000
6/27/2011	1:38:47 PM	PHl3 MFC set to  0.000000
6/27/2011	1:38:47 PM	SiCl4 MFC set to  0.000000
6/27/2011	1:38:47 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	1:38:47 PM	Tube furnace set to 0
6/27/2011	1:39:47 PM	Helium valve closed
6/27/2011	1:39:47 PM	H2 valve closed
6/27/2011	1:39:47 PM	BCl3 valve closed
6/27/2011	1:39:47 PM	PH3 valve closed
6/27/2011	1:39:47 PM	SiCl4 pre valve closed
6/27/2011	1:39:47 PM	SiCl4 post valve closed
6/27/2011	1:39:47 PM	Bypass valve closed
6/27/2011	1:39:47 PM	Bubbler valve closed
6/27/2011	1:39:47 PM	Main Vac valve opened
6/27/2011	1:39:47 PM	Helium MFC set to  0.000000
6/27/2011	1:39:47 PM	H2 MFC set to  0.000000
6/27/2011	1:39:47 PM	BCl3 MFC set to  0.000000
6/27/2011	1:39:47 PM	PHl3 MFC set to  0.000000
6/27/2011	1:39:47 PM	SiCl4 MFC set to  0.000000
6/27/2011	1:39:47 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	1:39:47 PM	Tube furnace set to 0
6/27/2011	1:39:48 PM	Run finished at 1:39 PM
6/27/2011	1:39:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2011	1:57:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	1:57:08 PM	Recipe started at 1:57 PM
6/27/2011	1:57:08 PM	H2 valve closed
6/27/2011	1:57:08 PM	BCl3 valve closed
6/27/2011	1:57:08 PM	PH3 valve closed
6/27/2011	1:57:08 PM	SiCl4 pre valve closed
6/27/2011	1:57:08 PM	SiCl4 post valve closed
6/27/2011	1:57:08 PM	Main Vac valve closed
6/27/2011	1:57:08 PM	Bypass valve closed
6/27/2011	1:57:08 PM	Bubbler valve closed
6/27/2011	1:57:08 PM	Helium valve opened
6/27/2011	1:57:08 PM	Helium MFC set to  500.000000
6/27/2011	1:57:08 PM	H2 MFC set to  0.000000
6/27/2011	1:57:08 PM	BCl3 MFC set to  0.000000
6/27/2011	1:57:08 PM	PHl3 MFC set to  0.000000
6/27/2011	1:57:08 PM	SiCl4 MFC set to  0.000000
6/27/2011	1:57:08 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	1:57:08 PM	Tube furnace set to 0
6/27/2011	1:57:17 PM	Run aborted at 1:57 PM
6/27/2011	1:57:17 PM	Helium valve closed
6/27/2011	1:57:17 PM	H2 valve closed
6/27/2011	1:57:17 PM	BCl3 valve closed
6/27/2011	1:57:17 PM	PH3 valve closed
6/27/2011	1:57:17 PM	SiCl4 pre valve closed
6/27/2011	1:57:17 PM	SiCl4 post valve closed
6/27/2011	1:57:17 PM	Bypass valve closed
6/27/2011	1:57:17 PM	Main Vac valve closed
6/27/2011	1:57:17 PM	Bubbler valve closed
6/27/2011	1:57:17 PM	Helium MFC set to  0.000000
6/27/2011	1:57:17 PM	H2 MFC set to  0.000000
6/27/2011	1:57:17 PM	BCl3 MFC set to  0.000000
6/27/2011	1:57:17 PM	PHl3 MFC set to  0.000000
6/27/2011	1:57:17 PM	SiCl4 MFC set to  0.000000
6/27/2011	1:57:17 PM	Tube furnace set to 0
6/27/2011	1:57:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	1:57:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/27/2011	1:57:32 PM	Recipe started at 1:57 PM
6/27/2011	1:57:32 PM	Helium valve closed
6/27/2011	1:57:32 PM	H2 valve closed
6/27/2011	1:57:32 PM	BCl3 valve closed
6/27/2011	1:57:32 PM	PH3 valve closed
6/27/2011	1:57:32 PM	SiCl4 pre valve closed
6/27/2011	1:57:32 PM	SiCl4 post valve closed
6/27/2011	1:57:32 PM	Main Vac valve closed
6/27/2011	1:57:32 PM	Bubbler valve closed
6/27/2011	1:57:32 PM	Bypass valve opened
6/27/2011	1:57:32 PM	Helium MFC set to  0.000000
6/27/2011	1:57:32 PM	H2 MFC set to  0.000000
6/27/2011	1:57:32 PM	BCl3 MFC set to  0.000000
6/27/2011	1:57:32 PM	PHl3 MFC set to  0.000000
6/27/2011	1:57:32 PM	SiCl4 MFC set to  0.000000
6/27/2011	1:57:32 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	1:57:32 PM	Tube furnace set to 0
6/27/2011	1:59:42 PM	Helium valve closed
6/27/2011	1:59:42 PM	H2 valve closed
6/27/2011	1:59:42 PM	BCl3 valve closed
6/27/2011	1:59:42 PM	PH3 valve closed
6/27/2011	1:59:42 PM	SiCl4 pre valve closed
6/27/2011	1:59:43 PM	SiCl4 post valve closed
6/27/2011	1:59:43 PM	Main Vac valve closed
6/27/2011	1:59:43 PM	Bubbler valve closed
6/27/2011	1:59:43 PM	Bypass valve opened
6/27/2011	1:59:43 PM	Helium MFC set to  0.000000
6/27/2011	1:59:43 PM	H2 MFC set to  0.000000
6/27/2011	1:59:43 PM	BCl3 MFC set to  0.000000
6/27/2011	1:59:43 PM	PHl3 MFC set to  0.000000
6/27/2011	1:59:43 PM	SiCl4 MFC set to  0.000000
6/27/2011	1:59:43 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	1:59:43 PM	Tube furnace set to 0
6/27/2011	2:00:43 PM	Helium valve closed
6/27/2011	2:00:43 PM	H2 valve closed
6/27/2011	2:00:43 PM	BCl3 valve closed
6/27/2011	2:00:43 PM	PH3 valve closed
6/27/2011	2:00:43 PM	SiCl4 pre valve closed
6/27/2011	2:00:43 PM	SiCl4 post valve closed
6/27/2011	2:00:43 PM	Bypass valve closed
6/27/2011	2:00:43 PM	Bubbler valve closed
6/27/2011	2:00:43 PM	Main Vac valve opened
6/27/2011	2:00:43 PM	Helium MFC set to  0.000000
6/27/2011	2:00:43 PM	H2 MFC set to  0.000000
6/27/2011	2:00:43 PM	BCl3 MFC set to  0.000000
6/27/2011	2:00:43 PM	PHl3 MFC set to  0.000000
6/27/2011	2:00:43 PM	SiCl4 MFC set to  0.000000
6/27/2011	2:00:43 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	2:00:43 PM	Tube furnace set to 0
6/27/2011	2:00:44 PM	Run finished at 2:00 PM
6/27/2011	2:00:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/27/2011	2:09:12 PM	Program exited cleanly
6/27/2011	2:09:16 PM	Program started normally
6/27/2011	2:09:16 PM	Helium valve closed
6/27/2011	2:09:16 PM	H2 valve closed
6/27/2011	2:09:16 PM	BCl3 valve closed
6/27/2011	2:09:16 PM	PH3 valve closed
6/27/2011	2:09:16 PM	SiCl4 pre valve closed
6/27/2011	2:09:16 PM	SiCl4 post valve closed
6/27/2011	2:09:16 PM	Main Vac valve closed
6/27/2011	2:09:16 PM	Bypass valve closed
6/27/2011	2:09:16 PM	Bubbler valve closed
6/27/2011	2:09:16 PM	Helium MFC set to  0.000000
6/27/2011	2:09:16 PM	H2 MFC set to  0.000000
6/27/2011	2:09:16 PM	BCl3 MFC set to  0.000000
6/27/2011	2:09:16 PM	PHl3 MFC set to  0.000000
6/27/2011	2:09:16 PM	SiCl4 MFC set to  0.000000
6/27/2011	2:09:16 PM	Bypass solenoid MFC set to  760.000000
6/27/2011	2:09:16 PM	Tube furnace set to 0
6/27/2011	2:09:21 PM	Main Vac valve opened
6/27/2011	2:10:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/27/2011	2:10:13 PM	Recipe started at 2:10 PM
6/27/2011	2:10:13 PM	Helium valve closed
6/27/2011	2:10:13 PM	H2 valve closed
6/27/2011	2:10:13 PM	BCl3 valve closed
6/27/2011	2:10:13 PM	PH3 valve closed
6/27/2011	2:10:13 PM	SiCl4 pre valve closed
6/27/2011	2:10:13 PM	SiCl4 post valve closed
6/27/2011	2:10:13 PM	Main Vac valve closed
6/27/2011	2:10:13 PM	Bypass valve closed
6/27/2011	2:10:13 PM	Bubbler valve closed
6/27/2011	2:10:13 PM	Helium MFC set to  0.000000
6/27/2011	2:10:13 PM	H2 MFC set to  0.000000
6/27/2011	2:10:13 PM	BCl3 MFC set to  0.000000
6/27/2011	2:10:13 PM	PHl3 MFC set to  0.000000
6/27/2011	2:10:13 PM	SiCl4 MFC set to  0.000000
6/27/2011	2:10:13 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	2:10:13 PM	Tube furnace set to 0
6/27/2011	2:10:13 PM	Run finished at 2:10 PM
6/27/2011	2:10:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/27/2011	2:10:17 PM	Main Vac valve opened
6/27/2011	2:10:38 PM	Program exited cleanly
6/27/2011	2:49:18 PM	Program started normally
6/27/2011	2:49:18 PM	Helium valve closed
6/27/2011	2:49:18 PM	H2 valve closed
6/27/2011	2:49:18 PM	BCl3 valve closed
6/27/2011	2:49:18 PM	PH3 valve closed
6/27/2011	2:49:18 PM	SiCl4 pre valve closed
6/27/2011	2:49:18 PM	SiCl4 post valve closed
6/27/2011	2:49:18 PM	Main Vac valve closed
6/27/2011	2:49:18 PM	Bypass valve closed
6/27/2011	2:49:18 PM	Bubbler valve closed
6/27/2011	2:49:18 PM	Helium MFC set to  0.000000
6/27/2011	2:49:18 PM	H2 MFC set to  0.000000
6/27/2011	2:49:18 PM	BCl3 MFC set to  0.000000
6/27/2011	2:49:18 PM	PHl3 MFC set to  0.000000
6/27/2011	2:49:18 PM	SiCl4 MFC set to  0.000000
6/27/2011	2:49:18 PM	Bypass solenoid MFC set to  760.000000
6/27/2011	2:49:19 PM	Tube furnace set to 0
6/27/2011	2:49:22 PM	Main Vac valve opened
6/27/2011	2:49:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	2:49:28 PM	Recipe started at 2:49 PM
6/27/2011	2:49:28 PM	H2 valve closed
6/27/2011	2:49:28 PM	BCl3 valve closed
6/27/2011	2:49:28 PM	PH3 valve closed
6/27/2011	2:49:28 PM	SiCl4 pre valve closed
6/27/2011	2:49:28 PM	SiCl4 post valve closed
6/27/2011	2:49:28 PM	Main Vac valve closed
6/27/2011	2:49:28 PM	Bypass valve closed
6/27/2011	2:49:28 PM	Bubbler valve closed
6/27/2011	2:49:28 PM	Helium valve opened
6/27/2011	2:49:28 PM	Helium MFC set to  500.000000
6/27/2011	2:49:28 PM	H2 MFC set to  0.000000
6/27/2011	2:49:28 PM	BCl3 MFC set to  0.000000
6/27/2011	2:49:28 PM	PHl3 MFC set to  0.000000
6/27/2011	2:49:28 PM	SiCl4 MFC set to  0.000000
6/27/2011	2:49:28 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	2:49:28 PM	Tube furnace set to 0
6/27/2011	2:49:37 PM	Run aborted at 2:49 PM
6/27/2011	2:49:37 PM	Helium valve closed
6/27/2011	2:49:37 PM	H2 valve closed
6/27/2011	2:49:37 PM	BCl3 valve closed
6/27/2011	2:49:37 PM	PH3 valve closed
6/27/2011	2:49:37 PM	SiCl4 pre valve closed
6/27/2011	2:49:37 PM	SiCl4 post valve closed
6/27/2011	2:49:37 PM	Bypass valve closed
6/27/2011	2:49:37 PM	Main Vac valve closed
6/27/2011	2:49:37 PM	Bubbler valve closed
6/27/2011	2:49:37 PM	Helium MFC set to  0.000000
6/27/2011	2:49:37 PM	H2 MFC set to  0.000000
6/27/2011	2:49:37 PM	BCl3 MFC set to  0.000000
6/27/2011	2:49:37 PM	PHl3 MFC set to  0.000000
6/27/2011	2:49:37 PM	SiCl4 MFC set to  0.000000
6/27/2011	2:49:37 PM	Tube furnace set to 0
6/27/2011	2:49:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	2:49:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2011	2:49:42 PM	Recipe started at 2:49 PM
6/27/2011	2:49:42 PM	Helium valve closed
6/27/2011	2:49:42 PM	H2 valve closed
6/27/2011	2:49:42 PM	BCl3 valve closed
6/27/2011	2:49:42 PM	PH3 valve closed
6/27/2011	2:49:42 PM	SiCl4 pre valve closed
6/27/2011	2:49:42 PM	SiCl4 post valve closed
6/27/2011	2:49:42 PM	Main Vac valve closed
6/27/2011	2:49:42 PM	Bubbler valve closed
6/27/2011	2:49:42 PM	Bypass valve opened
6/27/2011	2:49:42 PM	Helium MFC set to  0.000000
6/27/2011	2:49:42 PM	H2 MFC set to  0.000000
6/27/2011	2:49:42 PM	BCl3 MFC set to  0.000000
6/27/2011	2:49:42 PM	PHl3 MFC set to  0.000000
6/27/2011	2:49:42 PM	SiCl4 MFC set to  0.000000
6/27/2011	2:49:42 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	2:49:42 PM	Tube furnace set to 0
6/27/2011	2:51:49 PM	Helium valve closed
6/27/2011	2:51:49 PM	H2 valve closed
6/27/2011	2:51:49 PM	BCl3 valve closed
6/27/2011	2:51:49 PM	PH3 valve closed
6/27/2011	2:51:49 PM	SiCl4 pre valve closed
6/27/2011	2:51:49 PM	SiCl4 post valve closed
6/27/2011	2:51:49 PM	Main Vac valve closed
6/27/2011	2:51:49 PM	Bubbler valve closed
6/27/2011	2:51:49 PM	Bypass valve opened
6/27/2011	2:51:49 PM	Helium MFC set to  0.000000
6/27/2011	2:51:49 PM	H2 MFC set to  0.000000
6/27/2011	2:51:49 PM	BCl3 MFC set to  0.000000
6/27/2011	2:51:49 PM	PHl3 MFC set to  0.000000
6/27/2011	2:51:49 PM	SiCl4 MFC set to  0.000000
6/27/2011	2:51:49 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	2:51:49 PM	Tube furnace set to 0
6/27/2011	2:52:49 PM	Helium valve closed
6/27/2011	2:52:49 PM	H2 valve closed
6/27/2011	2:52:49 PM	BCl3 valve closed
6/27/2011	2:52:49 PM	PH3 valve closed
6/27/2011	2:52:49 PM	SiCl4 pre valve closed
6/27/2011	2:52:49 PM	SiCl4 post valve closed
6/27/2011	2:52:49 PM	Bypass valve closed
6/27/2011	2:52:49 PM	Bubbler valve closed
6/27/2011	2:52:49 PM	Main Vac valve opened
6/27/2011	2:52:49 PM	Helium MFC set to  0.000000
6/27/2011	2:52:49 PM	H2 MFC set to  0.000000
6/27/2011	2:52:49 PM	BCl3 MFC set to  0.000000
6/27/2011	2:52:49 PM	PHl3 MFC set to  0.000000
6/27/2011	2:52:49 PM	SiCl4 MFC set to  0.000000
6/27/2011	2:52:49 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	2:52:49 PM	Tube furnace set to 0
6/27/2011	2:52:50 PM	Run finished at 2:52 PM
6/27/2011	2:52:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2011	2:53:54 PM	Program exited cleanly
6/27/2011	3:03:22 PM	Program started normally
6/27/2011	3:03:22 PM	Helium valve closed
6/27/2011	3:03:22 PM	H2 valve closed
6/27/2011	3:03:22 PM	BCl3 valve closed
6/27/2011	3:03:22 PM	PH3 valve closed
6/27/2011	3:03:22 PM	SiCl4 pre valve closed
6/27/2011	3:03:22 PM	SiCl4 post valve closed
6/27/2011	3:03:22 PM	Main Vac valve closed
6/27/2011	3:03:22 PM	Bypass valve closed
6/27/2011	3:03:22 PM	Bubbler valve closed
6/27/2011	3:03:22 PM	Helium MFC set to  0.000000
6/27/2011	3:03:22 PM	H2 MFC set to  0.000000
6/27/2011	3:03:22 PM	BCl3 MFC set to  0.000000
6/27/2011	3:03:22 PM	PHl3 MFC set to  0.000000
6/27/2011	3:03:22 PM	SiCl4 MFC set to  0.000000
6/27/2011	3:03:22 PM	Bypass solenoid MFC set to  760.000000
6/27/2011	3:03:22 PM	Tube furnace set to 0
6/27/2011	3:03:31 PM	Program exited cleanly
6/27/2011	3:03:52 PM	Program started normally
6/27/2011	3:03:52 PM	Helium valve closed
6/27/2011	3:03:52 PM	H2 valve closed
6/27/2011	3:03:52 PM	BCl3 valve closed
6/27/2011	3:03:52 PM	PH3 valve closed
6/27/2011	3:03:52 PM	SiCl4 pre valve closed
6/27/2011	3:03:52 PM	SiCl4 post valve closed
6/27/2011	3:03:52 PM	Main Vac valve closed
6/27/2011	3:03:52 PM	Bypass valve closed
6/27/2011	3:03:52 PM	Bubbler valve closed
6/27/2011	3:03:52 PM	Helium MFC set to  0.000000
6/27/2011	3:03:52 PM	H2 MFC set to  0.000000
6/27/2011	3:03:52 PM	BCl3 MFC set to  0.000000
6/27/2011	3:03:52 PM	PHl3 MFC set to  0.000000
6/27/2011	3:03:52 PM	SiCl4 MFC set to  0.000000
6/27/2011	3:03:52 PM	Bypass solenoid MFC set to  760.000000
6/27/2011	3:03:52 PM	Tube furnace set to 0
6/27/2011	3:03:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	3:03:54 PM	Recipe started at 3:03 PM
6/27/2011	3:03:54 PM	H2 valve closed
6/27/2011	3:03:54 PM	BCl3 valve closed
6/27/2011	3:03:54 PM	PH3 valve closed
6/27/2011	3:03:54 PM	SiCl4 pre valve closed
6/27/2011	3:03:54 PM	SiCl4 post valve closed
6/27/2011	3:03:54 PM	Main Vac valve closed
6/27/2011	3:03:54 PM	Bypass valve closed
6/27/2011	3:03:54 PM	Bubbler valve closed
6/27/2011	3:03:54 PM	Helium valve opened
6/27/2011	3:03:54 PM	Helium MFC set to  500.000000
6/27/2011	3:03:54 PM	H2 MFC set to  0.000000
6/27/2011	3:03:54 PM	BCl3 MFC set to  0.000000
6/27/2011	3:03:54 PM	PHl3 MFC set to  0.000000
6/27/2011	3:03:54 PM	SiCl4 MFC set to  0.000000
6/27/2011	3:03:54 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	3:03:54 PM	Tube furnace set to 0
6/27/2011	3:06:05 PM	Helium valve closed
6/27/2011	3:06:05 PM	H2 valve closed
6/27/2011	3:06:05 PM	BCl3 valve closed
6/27/2011	3:06:05 PM	PH3 valve closed
6/27/2011	3:06:05 PM	SiCl4 pre valve closed
6/27/2011	3:06:05 PM	SiCl4 post valve closed
6/27/2011	3:06:05 PM	Main Vac valve closed
6/27/2011	3:06:05 PM	Bypass valve closed
6/27/2011	3:06:05 PM	Bubbler valve closed
6/27/2011	3:06:05 PM	Helium MFC set to  0.000000
6/27/2011	3:06:05 PM	H2 MFC set to  0.000000
6/27/2011	3:06:05 PM	BCl3 MFC set to  0.000000
6/27/2011	3:06:05 PM	PHl3 MFC set to  0.000000
6/27/2011	3:06:05 PM	SiCl4 MFC set to  0.000000
6/27/2011	3:06:05 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	3:06:05 PM	Tube furnace set to 0
6/27/2011	3:06:06 PM	Run finished at 3:06 PM
6/27/2011	3:06:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/27/2011	3:07:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2011	3:07:07 PM	Recipe started at 3:07 PM
6/27/2011	3:07:07 PM	Helium valve closed
6/27/2011	3:07:07 PM	H2 valve closed
6/27/2011	3:07:07 PM	BCl3 valve closed
6/27/2011	3:07:07 PM	PH3 valve closed
6/27/2011	3:07:07 PM	SiCl4 pre valve closed
6/27/2011	3:07:07 PM	SiCl4 post valve closed
6/27/2011	3:07:07 PM	Main Vac valve closed
6/27/2011	3:07:07 PM	Bubbler valve closed
6/27/2011	3:07:07 PM	Bypass valve opened
6/27/2011	3:07:07 PM	Helium MFC set to  0.000000
6/27/2011	3:07:07 PM	H2 MFC set to  0.000000
6/27/2011	3:07:07 PM	BCl3 MFC set to  0.000000
6/27/2011	3:07:07 PM	PHl3 MFC set to  0.000000
6/27/2011	3:07:07 PM	SiCl4 MFC set to  0.000000
6/27/2011	3:07:07 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	3:07:07 PM	Tube furnace set to 0
6/27/2011	3:09:52 PM	Helium valve closed
6/27/2011	3:09:52 PM	H2 valve closed
6/27/2011	3:09:52 PM	BCl3 valve closed
6/27/2011	3:09:52 PM	PH3 valve closed
6/27/2011	3:09:52 PM	SiCl4 pre valve closed
6/27/2011	3:09:52 PM	SiCl4 post valve closed
6/27/2011	3:09:52 PM	Main Vac valve closed
6/27/2011	3:09:52 PM	Bubbler valve closed
6/27/2011	3:09:52 PM	Bypass valve opened
6/27/2011	3:09:52 PM	Helium MFC set to  0.000000
6/27/2011	3:09:52 PM	H2 MFC set to  0.000000
6/27/2011	3:09:52 PM	BCl3 MFC set to  0.000000
6/27/2011	3:09:52 PM	PHl3 MFC set to  0.000000
6/27/2011	3:09:52 PM	SiCl4 MFC set to  0.000000
6/27/2011	3:09:52 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	3:09:52 PM	Tube furnace set to 0
6/27/2011	3:10:52 PM	Helium valve closed
6/27/2011	3:10:52 PM	H2 valve closed
6/27/2011	3:10:52 PM	BCl3 valve closed
6/27/2011	3:10:52 PM	PH3 valve closed
6/27/2011	3:10:52 PM	SiCl4 pre valve closed
6/27/2011	3:10:52 PM	SiCl4 post valve closed
6/27/2011	3:10:52 PM	Bypass valve closed
6/27/2011	3:10:52 PM	Bubbler valve closed
6/27/2011	3:10:52 PM	Main Vac valve opened
6/27/2011	3:10:52 PM	Helium MFC set to  0.000000
6/27/2011	3:10:52 PM	H2 MFC set to  0.000000
6/27/2011	3:10:52 PM	BCl3 MFC set to  0.000000
6/27/2011	3:10:52 PM	PHl3 MFC set to  0.000000
6/27/2011	3:10:52 PM	SiCl4 MFC set to  0.000000
6/27/2011	3:10:52 PM	Bypass solenoid MFC set to  0.000000
6/27/2011	3:10:52 PM	Tube furnace set to 0
6/27/2011	3:10:53 PM	Run finished at 3:10 PM
6/27/2011	3:10:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/27/2011	4:12:48 PM	Program exited cleanly
6/27/2011	4:12:49 PM	Program started normally
6/27/2011	4:12:49 PM	Helium valve closed
6/27/2011	4:12:49 PM	H2 valve closed
6/27/2011	4:12:49 PM	BCl3 valve closed
6/27/2011	4:12:49 PM	PH3 valve closed
6/27/2011	4:12:49 PM	SiCl4 pre valve closed
6/27/2011	4:12:49 PM	SiCl4 post valve closed
6/27/2011	4:12:49 PM	Main Vac valve closed
6/27/2011	4:12:49 PM	Bypass valve closed
6/27/2011	4:12:49 PM	Bubbler valve closed
6/27/2011	4:12:49 PM	Helium MFC set to  0.000000
6/27/2011	4:12:49 PM	H2 MFC set to  0.000000
6/27/2011	4:12:49 PM	BCl3 MFC set to  0.000000
6/27/2011	4:12:49 PM	PHl3 MFC set to  0.000000
6/27/2011	4:12:49 PM	SiCl4 MFC set to  0.000000
6/27/2011	4:12:49 PM	Bypass solenoid MFC set to  760.000000
6/27/2011	4:12:49 PM	Tube furnace set to 0
6/27/2011	4:12:50 PM	Main Vac valve opened
6/27/2011	4:13:00 PM	Main Vac valve closed
6/27/2011	4:13:01 PM	Main Vac valve opened
